MEMS–VCSEL design method using a diffraction loss map

Abstract

The micro–optical resonator of the microelectromechanical system(MEMS) tunable vertical cavity surface emitting laser(VCSEL), which is a gain–guided laser, consists of two mirrors fabricated on semiconductor chips of different materials. To understand the relationship between the curvature radius of the concave mirror and the diameter of the tunnel junction forming the active region, the diffraction loss map was obtained. The Fox–Li method was used with the integral kernel of the Rayleigh–Sommerfeld diffraction to simulate an optical resonator with a large Fresnel number. We derived the guideline for the actual bonding process of the different material chips by simulating with each parameter.