MEMS SPDT microswitch with low actuation voltage for RF applications

Abstract

Purpose– This paper aims to propose a novel design of an ohmic contact single-pole double-throw (SPDT) microelectromechanical system (MEMS) microswitch for radio frequency applications.Design/methodology/approach– The proposed microswitch (SPDT design) shares antenna between transmitter and receiver in a wireless sensor. An electrical voltage is used to create an electrostatic force that controls the ON/OFF states of the microswitch. First, the authors develop a mathematical model of the proposed microswitch and propose a reduced-order model of the design, based on the differential quadrature method, which fully incorporates the electrostatic force nonlinearities. The authors solve the static, transient and dynamic behavior and compare the results with finite element solutions. Then, the authors examine the dynamic solution of the switch under different actuation waveforms.Findings– The obtained results showed a significant reduction in actuation voltage, pull-in bandwidth and switching time.Originality/value– In this paper, a new design of SPDT MEMS switch is proposed, the SPDT switch needs low voltage to be actuated and it can be easily integrated with integrated circuits.