MEMS Sensor Devices with a Piezo-Resistive Cantilever

Abstract

We have engaged in researching and developing a large number of sensor devices using piezo-resistive cantilevers. The important technical features of our sensor devices lie in their very high detection sensitivity that has been achieved by the use of cantilevers of a very thin structure: as a typical example, force-detection sensitivity of about 10 pN has been achieved by using cantilevers of 300-nm thickness. This paper presents our developed sensor devices and applications and their respective features: more specifically, devices to directly measure object-contacting forces, devices embedded in an elastic body to measure its deformations, devices to measure air flows and vibrations, devices to measure differential air pressure, devices to measure differential pressure between cavities and external environment, and devices with cantilevers arranged on the liquid interface.