Abstract
The piezoresistive cantilevers in our AFM data storage system are subject to several design requirements. First, the cantilevers need to have sufficiently low mechanical stiffness to enable low-wear operation on polycarbonate. Second, the cantilevers need to have sufficiently high piezoresistive sensitivity to be able to detect topographic steps on the order of 100 A. Third, the cantilevers need to have as high a resonant frequency as possible for high readback rate. To satisfy these requirements, cantilevers of thickness 1 μm or below have been fabricated. This is at least two times thinner than previously reported piezoresistive cantilevers, such as those of Tortonese, et al. [4.1, 4.2]. The fabrication process of Tortonese, et al., had to be modified before it could be applied to 1 μm thick cantilevers. The modifications involved, as well as the measured performance of the fabricated cantilevers, will be described.
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