Abstract
ABSTRACTResonators and switches are fabricated on LSI for advance wireless communication systems. In addition to surface micromachining, adhesive bonding has been applied for the fabrication. Lamb wave resonators are fabricated for multi-frequency oscillators by surface micromachining. Multi-band filters are formed by a MEMS process after bonding a Si wafer to a LSI wafer (wafer bonding first approach). SAW filters are made by bonding a MEMS wafer to a LSI wafer (wafer bonding last approach). Variable capacitors are fabricated on a piezoelectric LiNbO3 wafer. Wafer level packaging techniques are developed to encapsulate the MEMS on LSI. Open collaboration as shared wafer, prototyping facility and hands-on access fabrication facility are discussed to reduce a cost and a risk in the development of the MEMS on LSI.
Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
