Abstract
In this paper, we report latest developments in wafer-level micro-glassblowing paradigm for fabrication of highly symmetric, high Q-factor fused silica wineglass gyroscopes. Q-factors over 1 million have been demonstrated on both n = 2 wineglass modes with a high frequency symmetry (Δf/f) of 132ppm. High Q-factor is enabled by a high aspect ratio, self-aligned glassblown stem structure, careful surface treatment of the perimeter area, and low internal loss fused silica material. Low frequency split is provided by the self-correcting behavior of the surface tension based micro-glassblowing process. Micro- glassblowing may enable batch-fabrication of high performance fused silica wineglass gyroscopes on a wafer surface at a significantly lower cost than their precision-machined macro-scale counterparts.
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