Abstract
This paper presents a MEMS structure of electrodynamic loudspeakers dedicated to mobile phone applications. The major goals are to obtain a high electroacoustic conversion efficiency and a high fidelity acoustic quality. The originalities lie in a rigid silicon membrane and in its suspension by a set of silicon beams. The moving coil is a planar copper microcoil electroplated on the silicon membrane whose microstructure was optimized for providing both rigidity and lightness of the mobile part. This paper presents different magnetic structures of the motor for this MEMS loudspeaker. These structures are ironless, only made out of permanent magnets which are bonded on the substrate. They are studied and optimized thanks to analytical formulations of the magnetic field created by the permanent magnets. Results are presented for a deep RIE etched 7.5 mm radius silicon membrane structured with 40 stiffening ribs and on a 30 μm thick microcoil with 35 turns.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
