Abstract
Building structure health monitoring is essential for modern buildings, sensors related to building structure health monitoring are often made with microelectrostatic cantilever beam (MECB), and the performance of this kind of devices is often affected by instability, which affects the measurement results and accuracy. Therefore, it is necessary to study the nonlinear dynamic characteristics of the MECB in the process of bending and pull-in. In this paper, based on the energy principle and fluid pressure film damping effect, the dynamic equation mathematical model of MECB is established and then the dynamic characteristics of the pull-in and lift-off voltage of the MECB and the harmonic motion characteristics under the bias voltage are obtained, which provides guidance for the design of the electrostatic driving sensor.
Highlights
Building structure health monitoring is essential for modern buildings
Electrostaticdriven multilayer cantilever beams are widely used in building structure monitoring sensors
To improve the accuracy of the calculation, the model needs to be divided into a very detailed grid to solve, the refinement of the grid will inevitably lead to the allocation of a large number of resources, which cannot meet the solution under multiparameters and multiexcitation, so the optimization efficiency of the parameter design space is very low, and it is even more difficult to deal with the MEMS devices of multidevices
Summary
Building structure health monitoring is essential for modern buildings. Due to the action of various external forces (i.e., loads), building structures will produce certain damage. As the basic structural devices of many MEMS devices, microelectrostatic cantilever beams (MECBs) are widely used in RF switches, low-light switches, and pressure sensors, as well as MEMS devices in building structure monitoring systems [7–10]. Erefore, in the process of device-level design of building monitoring MEMS, it is increasingly important to find a high-precision, high-economic and fast optimization method for MECB. To improve the accuracy of the calculation, the model needs to be divided into a very detailed grid to solve, the refinement of the grid will inevitably lead to the allocation of a large number of resources, which cannot meet the solution under multiparameters and multiexcitation, so the optimization efficiency of the parameter design space is very low, and it is even more difficult to deal with the MEMS devices of multidevices. In this paper, according to the principle of conservation of energy, the MECB model of the building monitoring MEMS is constructed. e model is solved in Simulink, and the dynamic characteristics of the MECB under pull-in and lift-off voltage and the harmonic motion characteristics under bias voltage are obtained. e research results of this paper will greatly improve the development and application of building monitoring MEMS system
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