Abstract
A MEMS acceleration switch capable of tuning threshold acceleration to either higher or lower levels is designed and implemented with comb drive actuators as a mechanism of threshold tuning. A small sized switch (1.6×3.1×0.55mm3) is successfully realized by patterning silicon structures on a glass wafer. The resonant frequency of fabricated switches agrees well with a designed frequency of 1.1kHz. The threshold acceleration at no tuning voltage is 10.25g and it is subsequently tuned to 2.0g and 17.25g by applying 30V to pushing comb and pulling comb, respectively. The rising time is measured to be 9.8ms. Additional functionalities such as safe/armed position convertibility and single use latching switch are also described for diverse applications of the tunable acceleration switches.
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