Abstract
A micromachined acceleration switch capable of increasing the threshold acceleration is proposed. Comb drive actuators were used to tune the threshold acceleration. The acceleration switch was successfully fabricated using a silicon-on-glass process. Switching characteristics were measured in a centrifugal chamber and a turn-on response time was 0.38 ms. The threshold acceleration was 11 g without a tuning voltage, and it was effectively increased up to 30 g with a tuning voltage of 30 V at the comb actuators, which is about 270% increased threshold compared to the initial threshold with zero tuning voltage.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
