Abstract
The effect of a high-power ion beam on thin aluminum films (0.3 and 1.9 μm thick) deposited onto dielectric substrates made of sodium-silicate glass and pyroceramics is studied. The main stages of changes in the surface morphology of a film, namely, its melting and transformation into an array of individual metal particles, are determined. Possible mechanisms of the detected phenomena are considered.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Paper version not known
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
