Abstract
We have studied the formation of nanoparticles in a thin metal film-dielectric substrate system under the action of a high-power nanosecond pulsed proton-carbon ion beam. Data on the particles formed from 5-to 60-nm-thick aluminum and nickel films on ST-50 Sitall (glass-ceramic composite) substrates are presented. Possible mechanisms of nanoparticle formation in ion-irradiated metal films on dielectric substrates are considered.
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