Mechanisms of sustaining a radio-frequency atmospheric pressure planar discharge

Abstract

The time behavior of an atmospheric pressure planar discharge sustained in He gas was investigated experimentally and through two dimensional (2D) discharge simulation. The 30 mm long uniform α-mode discharge was observed at radio frequency (RF) input power below 35 W. The gas temperature of 375 ± 50 K in the discharge core was estimated by emission spectroscopy of OH(A–X) emission. A sheath region of about 100–150 μm width near both electrodes was observed during the whole RF cycle. However, there were differences in emission dynamics among various species detected in the discharge. OH(A) emission does not follow the RF voltage temporal variation. Strong He emission was always detected near the cathode, which was consistent with the 2D discharge simulation results. He-excited species production was found mainly due to the electron impact process. The simulation showed that both the electron and ion density vary from 1.88 × 1017 m−3 to 1.92 × 1017 m−3, and the electron temperature was about 1.85 eV in the plasma bulk. The ion temperature stayed close to the rotational temperature of OH radicals, and only increased near the sheath region to 0.65 eV. It was found that the mechanism of the sheath formation in atmospheric pressure discharge strongly correlates with the dynamics of the electron density and electron temperature variation in the gap, and the process is similar to low pressure RF capacitively coupled discharges. The high uniformity of the discharge and the upscale possibility to any desirable size are considered beneficial for industrial applications of the source, which is key for processes of thin coating deposition and polymer modification.