Abstract
The mechanism of macropore formation in anodized p-type Si was studied using an aqueous HF solution. The depth profile of the anodized surface and the dissolution valence were investigated by varying anodic time. The dissolution valence increased at the initial stage of anodization and decreased after macropore formation. The experimental results are explained with the electrochemical reaction model, which describes that F- and OH- react with Si mainly at the bottom and the top of the macropore, respectively.
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