Abstract
The process of carbon-film formation in a discharge with crossed electric and magnetic fields in neon and argon has been studied in a system with a cylindrical geometry of electrodes. Radial profiles of the film thickness on an edge substrate have been measured using an interferometric technique. A diffusion model of film formation is proposed, which takes into account the inert gas ion charge exchange and gas heating processes. Experimental data are compared to the results of model calculations.
Full Text
Published Version
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call