Abstract
Detector diodes have been successfully used in differential capacitive MEMS accelerometer for capacitance-to-voltage conversion. During capacitances’ charging and discharging, charge accumulation makes test results disagree with the calculated values based on its differential equations simply and finally has a great influence on circuit’s optimization. A model of charges accumulation process is built to describe the real conversion relationship between the value of capacitance variations and the output voltage. Experiments show that the model not only meets the test result well but also provides a foundation for circuit’s optimization.
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