Abstract
Pressure sensors and aceelerometer structures have been fabricated in a commercial CMOS foundry technology (1.0 µm from Atmel-ES2) using a post-processing for back-side wafer micromachining. The overall technology (CMOS plus post-processing) can be used for integrated sensor system design through a specific design kit in the standard foundry design environment. Fabrication is then performed so that postprocessing is transparent to the user.
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