Abstract
Nanocrystalline deformed layers were generated in cadmium zinc telluride (CZT) single crystals by nanogrinding using three different grit sizes. The mechanical properties of the deformed layers were measured using nanoindentation. The hardness of the deformed nanocrystalline layers in the soft-brittle CZT semiconductor was higher than that of the perfect single crystal. This result is different from those found for deformed layers of hard-brittle silicon semiconductors, where the hardness of the deformed layers is lower than those of the perfect single crystal.
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