Abstract
Internal stresses σ0, friction coefficients fand microhardness were measured in diamond-like coatings obtained by vacuum-arc sputtering of carbon target at different nitrogen pressures in a work chamber during deposition on metallic substrates. The dependence of these parameters on nitrogen concentration in coatings can be used in practical deposition of strengthening and friction coatings for improvement of their tribological properties. The correlation between mechanical properties of diamond-like and CN x coatings was established.
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