Mechanical properties of amorphous carbon coatings prepared using plasma assisted chemical vapor deposition

Abstract

Amorphous carbon/metal carbide gradient coatings were prepared by a combination of plasma assisted chemical vapor deposition and rf sputtering techniques. The structure of the coatings was characterized by scanning electron microscopy and transmission electron diffraction. A scratch tester measured the adhesion of the coatings. The depth-sensing indentation technique was used to measure the hardness, elastic and plastic properties of the amorphous carbon coatings. The measured results revealed that the amorphous carbon coatings with metal carbide interlayer have a uniform structure and better mechanical properties than that of pure amorphous carbon coatings.