Abstract
Lead Zirconate Titanate (PZT) is a piezo-electric ceramic material that needs to be characterized for its potential use in microelectronics. Energy dispersive X-ray analysis (EDX) is conducted to determine the chemical composition of the PZT ceramics. The scanning electron microscope (SEM) is performed to study the surface morphology, grain structure and grain boundaries. The SEM image helps us to understand the surface wave propagation and scattering phenomena by the PZT and the reason for its anisotropy and inhomogeneity due to the grain structure. In this paper scanning acoustic microscopy at 100MHz excitation frequency is conducted for determining mechanical properties of PZT. Earlier works reported only the longitudinal wave speed in PZT while in this paper longitudinal, shear and surface acoustic wave speeds of sintered PZT are measured from its acoustic material signature (AMS) curves, also known as V(z) curves. AMS or V(z) curve is the variation of the output voltage as a function of the distance between the acoustic lens focal point and the reflecting surface. The average velocities of longitudinal, shear and surface acoustic waves in a PZT specimen are determined from its V(z) curve generated at 100MHz excitation frequency and found to be over 5000m/s, over 3000m/s and between 2500 and 3000m/s, respectively. From these velocities all elastic constants of the specimen are obtained.
Published Version
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