Abstract
Dynamic agitation during imprint is investigated as a means to reduce the imprint temperature of thermoplastic materials. The imprint system used consists of a stepping motor and a piezo unit as the main components. The motor controls the working point of the system, and a sinusoidal motion of the piezo unit (3 piezos at 120° with respect to each other) superimposes an additional dynamic excitation. The system was characterized with respect to its mechanical behavior by exploiting analogies between mechanical and electrical quantities. The results show that the system can be operated at a frequency of up to about 60 Hz and that the piezos act as a dynamic motion source in the system. First imprint experiments with polystyrene at 100 °C indicate the potential of this frequency-assisted imprint technique.
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More From: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
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