Abstract

Our investigation of diamond-like-carbon (DLC) nanosprings with a 130-nm spring section diameter, which were fabricated by focused-ion-beam chemical vapor deposition (FIB-CVD), showed for the first time that nanosprings can be stretched. We observed large displacements of the FIB-CVD nanosprings with in-situ optical microscopy; in other words, the nanosprings showed behavior similar to that of macroscale springs. In addition, we investigated the dependence of the spring constant of the DLC nanosprings on the spring diameter. The spring constants, measured using commercially available cantilevers, ranged from 0.47 to 0.07 N/m. The diameter dependence of the measured spring constant was accurately expressed by the conventional formula for a coil spring. The estimated shear modulus of the DLC nano-springs was about 70 GPa. This value is very close to the value of conventional coil springs made of steel.

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