Mechanical behavior of microscale carbon pillar fabricated by focused ion beam induced deposition

Abstract

Using phenanthrene gas (C14H10) as a precursor, microscale carbon pillars for a micro-mechanical machining tool application were prepared via focused ion beam-induced deposition. The microscale carbon pillars had an atomic concentration of about 90% carbon, 10% gallium, and 0.28% oxygen. The mechanical properties were measured via a microscale compression test using a nanoindentation system. The elastic modulus and compressive strength were 67 GPa and 8 GPa, respectively. Brittle fracture was observed during microscale compression.