Abstract
The mechanical and tribological (friction/wear)properties were determined for nanocrystalline aluminum, as-sputtered Ti, Zr and Cu films, and nanolaminated Al-Al 2O 3, TiTiN, TiCu and TiZr composite films. The aluminum grain size varied between 15 and 10 6 nm. The Al and Ti layer thicknesses in Al-Al 2O 3 and TiTiN composites ranged from 70 to 500 nm and from 150 to 450 nm, respectively. Within the grain size range of 15–100 nm, the hardness of the aluminum follows a Hall-Petch type relationship. The hardness of the TiTiN and Al-Al 2O 3 fllms also follows a Hall-Petch relationship with the Ti orAl layer thickness. The TiCu composites show a softening effect with decreasing Ti layer thickness. The coefficient of friction and wear rate for nanolaminated TiTiN and Al-Al 2O 3 composites are consistently reduced as the metal layer thickness is reduced. The micromechanisms responsible for the differences in mechanical and tribological properties are examined and the results compared with published literature.
Published Version
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