Mechanical analysis and optimization of a microcantilever sensor coated with a solid receptor film

Abstract

This letter presents an analytical model for the static deflection and optimization of a nanomechanical cantilever sensor coated with a solid receptor film. All relevant physical parameters of both cantilever and coating film are included; Young’s modulus, Poisson’s ratio, and geometrical parameters (length, width, and thickness). This model provides accurate values verified by a good agreement with those simulated by finite element analysis, while the Stoney’s equation [G. G. Stoney, Proc. R. Soc. London, Ser. A 82, 172 (1909)] and Sader’s model [J. E. Sader, J. Appl. Phys. 89, 2911 (2001)] which assume ideal surface stress without a solid coating film, result in significant deviation under some conditions. Mechanical analysis and optimization based on experimental results are also demonstrated as an example.