Abstract
We report the absolute measurements of X-ray production cross sections for L-shell ionization of Te element by electron impact in an energy range of 6–30 keV with a step of 1 keV. The measurements were conducted using a scanning electron microprobe with a high-resolution X-ray silicon drift detector (SDD). The measured total L-shell X-ray production cross sections of Te were compared with the theoretical results using the distorted-wave Born approximation (DWBA) and plane-wave Born approximation with Coulomb and exchange corrections (PWBA-C-Ex). Good agreement was observed between the measured and theoretical results.
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