Measuring Plasticity in Confined Cu Thin Films at Different Geometries

Abstract

We report quantitative measurement of plasticity in confined Cu thin films with a new micro-pillar testing protocol. Polycrystalline Cu and CrN thin films were sequentially sputter deposited onto Si (100) substrates, forming thin film assemblies in which polycrystalline Cu thin films of various thicknesses were confined between non-deforming Si and CrN. Cylindrical micro-pillars of CrN/Cu/Si were fabricated through scripted focused Ga+ ion beam milling, with the interfaces either normal to the axial direction or at a 45° inclination. The CrN/Cu/Si micro-pillars were compression loaded in the axial direction with a flat diamond punch on an instrumented nanoindenter. The axial compression loading caused extensive plasticity within the thin Cu interlayers with the interfaces in both the normal and inclined orientations, but with distinctly different responses. We show that significant plastic flow occurs within the confined Cu thin films in both normal compression and shear loading. The flow stress of the confined Cu films is dependent on the Cu layer thickness and the deformation geometry. The presently described micro-pillar testing protocol offers quantitative evaluation of the plastic response of thin metal films under different deformation geometries. The present results offer new experimental examples of scale-dependent plasticity in thin metal films, and new experimental test cases for non-local plasticity theories.