Measuring of the surface acoustic wave amplitude in the X-112° Y-cut of a LiTaO3 crystal using X-ray diffraction at the laboratory X-ray source

Abstract

The SAW excitation and propagation on the X-112° Y-cut of a LiTaO3 crystal were studied using a triple-axis X-ray diffractometer with a laboratory X-ray source. Simulation of X-ray rocking curves with the Takagi equation system enabled the determination of surface acoustic wave amplitudes on the crystal surface. The SAW excitation process in the frequency range of an acoustoelectronic device, determined by the excitation band or interdigital transducer structure, was studied.