Measuring Electron Temperature Using Pulsed and Floating Probe Method in Low-Pressure Gas Discharge Plasmas

Abstract

Plasma diagnostics of the electron temperature was performed through a hollow-cathode-type discharge tube using a pulsed and floating probe method. This method detects a shift in the floating potential when a pulse signal is fed into the probe through an intermediary blocking capacitor. The electron temperature was calculated in a previous study using the Bessel function of the <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$n$ </tex-math></inline-formula> th order; however, the proposed method greatly simplifies the calculation. In the duty ratio between 10% and 30%, the electron temperature measured using the pulsed and floating probe methods was approximately equal to the tail electron temperature, and it was varied by adjusting the duty ratio.