Measuring and calculating the Hall mobility of semiconductor epitaxial layers by a contactless method

Abstract

A new probe was made from microwave dielectric waveguides. Using this probe, we can measure the magnetoresistance of Al x Ga 1− x As, Hg 1− x Cd x Te and other epitaxial layers easily. It is a contactless and non-destructive method. During the test, we do not need to specially treat the surface and the shape of the samples. The measuring area is about 4 × 4 mm 2. This article also presents a method of calculating the mobility of these samples from the magnetoresistance data for different semiconductor materials.