Abstract
In this paper we present measurements of the quantitative lateral analytical resolution of the field emission (FEG) electron microprobe JEOL JXA-8530F. In particular, the minimum thicknesses of gold layers that are suitable for an accurate quantitative analysis are determined for several measurement parameters. Both, low voltage analyses at acceleration voltages from 15 kV to 5 kV and low overvoltage analyses at 13 and 15 kV are regarded. For both methods a minimum analytical resolution well below 170 nm is obtained while the X-ray signal is 5 times lower for the low overvoltage method. Special care is taken for the preparation of the test specimen. A Ag-layer reduces fluorescence effects and the cleaved surfaces are polished by a gentle focussed ion beam. The porosity of the gold layers is regarded by a separate measurement of the density (17.6 g/cm3). The results coincide well with Monte Carlo simulations of the source volume of generated X-rays if the reduced density of the gold layers and experimental determined values of the beam diameter are used. Additionally the results are used to investigate methods to estimate the width of the source volume of emitted X-rays by the superposition of the beam diameter and theoretical predictions of the width of the electron interaction volume. The linear sum of both gives a quite good agreement.
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