Abstract
We report what we believe is a novel method for measuring the thickness profiles of plane parallel plates by analyzing their Haidinger fringes. When an extended monochromatic source is viewed through a ∼1-mm-thick plate, concentric transmission-type Haidinger fringes can easily be observed. Small variations in the plate thickness result in changes in the radii of the ring fringes. In this study, we scanned 20-mm-diameter fused silica and BK7 plates while tracing a specific ring in each fringe pattern to measure the thickness profiles of the plates, achieving an uncertainty of 2nm in the measurements of the thickness differences between two locations on each plate.
Published Version
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