Year-end Sale % OFF 
Abstract
The ion-induced sputtering yields from monatomic solids at normal incidence are presented graphically for various ion–target combinations as a function of the incident ion energy. To supplement the experimental data, sputtering yields are calculated by the Monte Carlo simulation code ACAT for some ion–target combinations. Each graph shows the available experimental and ACAT data points, together with the sputtering yields calculated by an empirical formula whose parameters are determined from the best fit to available data.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
