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Abstract
The ion-induced sputtering yields of monatomic solids are presented graphically for various ion-target combinations as a function of the energy of normally incident ions. Each graph shows the available experimental data points for an ion-target combination and the energy dependence of the sputtering yield calculated from an empirical formula whose parameters were determined by the best fit to available data. The method of calculating the sputtering yields for any ion-target combination based upon the empirical formula is also described.
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