Abstract
Abstract The electron energy distribution function (EEDF) measurement in radio frequency (RF) plasmas is of fundamental interests, especially in low-density RF capacitively coupled plasma. For this purpose, a new external filter with very high impedances is developed. The impedance of the filter at the fundamental and its harmonic frequencies (13.56, 27.12 and 40.68 MHz) through careful circuit design is maximized. Experimental verifications are performed by measuring the EEDFs in RF discharges. The result shows that the RF distortion in the EEDF measurement is significantly reduced by tuning the filter under various discharge conditions in an inductively coupled plasma. Accurate plasma densities can be obtained and the electron heating mode transition is observed through high-quality EEDF measurement in an capacitively coupled plasma, where RF plasma potential fluctuates severely.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
