Electron Energy Distribution Function Measurements in an Inductively Driven Tandem Plasma Source

Abstract

AbstractSummary: Electron energy distribution functions (EEDF) are obtained from probe measurement data along the axis of the metallic chamber of an inductively driven tandem plasma source. The numerical procedure for calculating the second derivative of the probe current combines Savitzky‐Golay smoothing filter and the three‐point differentiator with a varying step. The EEDF is obtained through the Druyvesteyn formula from the calculated second derivative. The shape of the EEDFs in argon gas at low pressures is investigated for the case of a tandem plasma source. Experimental EEDFs are compared with Maxwellian distributions, and deviations in the tail are observed at higher pressures, which are explained in terms of the ratio between the electron‐electron collision frequency and the excitation frequency. Axial variations of the slope and of the area below the EEDF curve result in electron temperature and concentration decrease along the axis.Electron energy distribution function (EEDF) measured for gas pressure of 26 mTorr, at an axial position of 12 cm.imageElectron energy distribution function (EEDF) measured for gas pressure of 26 mTorr, at an axial position of 12 cm.