Abstract
A new technique for the measurement of the surface profile of optical surfaces of long radius of curvature is presented. A phase shifting lateral shearing interferometer is used. Laterally sheared wavefronts are generated due to Fresnel reflections of the test wavefront at oblique inci- dence from the (plane parallel and separated) inner surfaces of a pair of glass wedge plates. A pair of matched wedge plates, which together form a parallel plate, whose thickness can be varied by translating one of the wedges, is used to introduce phase shifts between the laterally sheared components.Surfaceslopesandprofilearedeterminedbyapplyingphase shifting interferometry. An optical setup for measurement of surface profile of beam line mirrors of synchrotron radiation sources is proposed. C 2010
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