Abstract
We have measured ‘‘in situ’’ the stresses generated in polyimide films produced from the ethyl ester of benzophenone tetracarbolic acid and methylene dianiline during the curing cycle. The room temperature stress in a fully cured film (to 400 °C) is approximately 70 MPa. The stresses at room temperature vary with the cure temperature and are due to coefficient of thermal expansion mismatch between film and substrate. The in situ measurements show that the glass transition temperature is the same as the maximum cure temperature that the film experiences. The stress measurements were made using an x-ray double crystal lattice curvature technique.
Published Version
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
More From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.