Abstract
Various fluorinated copolyimide films were prepared on a Si wafer from copoly(amic acid) solution of pyromellitic dianhydride (PMDA) or bis(3,4-dicarboxyliphenyl)hexafluoropropane dianhydride (6FDA) and a diamine mixture of 4,4′-oxydianiline (ODA) and 2,2′-bis-(trifluoromethyl)benzidine (BTBz). Refractive index and thickness of polyimide films were measured by means of spectral reflectance measurement. A gradual increase of the refractive, index was observed in the course of imidization for PMDA series polyimides and almost no change or a slight decrease for 6FDA series polyimides. Film thickness decreased about 30% after imidization. The refractive indices of final polyimides depended on the fluorine content as well as the structure of the copolyimide.
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