Abstract
Zirconium (Zr) plasma is produced by electron-impact ionization during Zr vapor evaporation in an electron beam evaporator. The plasma is embedded in the vapor. It expands along with the vapor in a transverse magnetic field. Parameters like ion density, electron temperature, space potential, floating potential of the plasma were measured by a disc type Langmuir probe. Since Zr metal has high melting point (∼ 2128 K), the evaporator is filled with condensable vapor and remains at high temperature (∼ 700 K). The probe was designed and fabricated in a manner that the insulator was protected from the direct deposition of Zr vapor. The measurement shows that the e-beam generated plasma is weakly ionized (degree of ionization ∼ 0.1 %) and it has low electron temperature (∼ 0.1 eV). It is also observed that the plasma ions have a flow velocity in vertical direction similar to the neutral atoms.
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