Abstract

Microwave plasma sources (MPSs) operating at atmospheric pressure provide plasmas in the form of a flame or cylindrical column. In contrast, this article presents an innovative MPS (patented by us) for generating a new type of plasma, i.e. in the form of a plasma sheet, which is generated in a flat cuboidal quartz box. It is based on a WR 340 waveguide, powered by microwaves of 2.45 GHz and operated in argon at atmospheric pressure. The plasma sheet contains a multitude of filaments typical of microwave argon plasmas. In the presented experiment, the spatial distribution of the OH radicals in the microwave plasma sheet was measured by means of the LIF method. Studies have shown that the relative concentration of OH radicals increases with the increase in microwave power and decreases with the increasing argon flow rate.

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