Abstract
There has been an increasing need for MEMS devices with composite films in recent years. This paper presents an improved model of pull-in voltage by finite-difference method (FDM) for a composite fixed-fixed beam, which takes influence of lateral residual stresses of each layer into account. Young's modulus and residual stresses of each layer for composite beam can then be extracted by these pull-in voltages. And fixed-fixed surface machined beams with multi-cup style anchor were fabricated to be suitable to the model of pull-in voltage. Validation and accuracy of the extracting method have been verified by FEM simulation and experiments.
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