Measurement of Gaussian laser beam radius using nanosecond-pulse laser etching of titanium film

Abstract

Abstract A method for measuring the Gaussian laser beam radius based on nanosecond-pulse laser etching (NPLE) was proposed. The NPLE method has the advantages of simple operation, low cost and high accuracy. It can be used to directly measure the laser beam size in the range of 0.25 ~ 6 W without attenuating the laser energy. In the experiments, 1064 nm pulsed laser beam was used to etch titanium film, the size and position of the laser beam waist were measured. The experimental results are consistent with the calibration values of the CCD method, it indicates that the NPLE method is feasible.