Abstract

Kelvin probe force microscopy is a scanning probe technique used to quantify the local electrostatic potential of a surface. In common implementations, the bias voltage between the tip and the sample is modulated. The resulting electrostatic force or force gradient is detected via lock-in techniques and canceled by adjusting the dc component of the tip–sample bias. This allows for an electrostatic characterization and simultaneously minimizes the electrostatic influence onto the topography measurement. However, a static contribution due to the bias modulation itself remains uncompensated, which can induce topographic height errors. Here, we demonstrate an alternative approach to find the surface potential without lock-in detection. Our method operates directly on the frequency-shift signal measured in frequency-modulated atomic force microscopy and continuously estimates the electrostatic influence due to the applied voltage modulation. This results in a continuous measurement of the local surface potential, the capacitance gradient, and the frequency shift induced by surface topography. In contrast to conventional techniques, the detection of the topography-induced frequency shift enables the compensation of all electrostatic influences, including the component arising from the bias modulation. This constitutes an important improvement over conventional techniques and paves the way for more reliable and accurate measurements of electrostatics and topography.

Highlights

  • Electrostatic forces are important interactions in non-contact atomic force microscopy (NC-AFM)

  • This results in a continuous measurement of the local surface potential, the capacitance gradient, and the frequency shift induced by surface topography

  • In contrast to conventional techniques, the detection of the topography-induced frequency shift enables the compensation of all electrostatic influences, including the component arising from the bias modulation

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Summary

Introduction

Electrostatic forces are important interactions in non-contact atomic force microscopy (NC-AFM). Traditional closed-loop controllers for KFM use lock-in techniques to measure the response of the cantilever at the modulation frequency ωm (not visible in Figure 1 since Udc ≈ Ulcpd) and at 2ωm [13,26,27]. Using the relationship shown in Equation 10 and the transfer function of the detection system, the sample properties, the expected error signals, and the correlation coefficients can be determined from the bias dependence of the frequency shift Δf(Uts). For robust estimation, it is beneficial if the surface potential Ulcpd is within the modulated bias voltage Uts(t).

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