Abstract
Clearance flows are the main loss mechanism in dry running positive displacement vacuum pumps. In order to calculate the operation of those pumps, a detailed knowledge of the clearance mass flow rates is crucial. The dimensions of such pumps and the large pressure range of the operating points require a wide range of gas rarefaction to be taken into account. The clearance flow can be described by a combined Couette Poiseuille flow due to the pressure gradient between two chambers and the rotation of the rotary pistons. These clearance flows are studied experimentally and theoretically in the present work. Therefore, a suitable experimental setup is described together with the requirements of sensors and the necessity of a low leakage. A theoretical approach is presented, and the results are compared to experimental investigations varying the pressure ratio and the circumferential speed of a clearance boundary in a wide range of the gas rarefaction.
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