Abstract

This study aims to propose and investigate a theoretical maximum traffic flow method. Furthermore, we propose a merging timing control based on the results obtained from this method, which are verified using actual automated guided vehicles. The results (micro-level optimization) enable automated guided vehicles to achieve a fabrication level optimization (macro-level optimization). Engineers working in the field of automated guided vehicles have found that there is an optimal headway distance that achieves a maximum traffic throughput when automated guided vehicles operate with merging points. “Zipper merging” is known to be a suitable merging method resulting from “Jamology.” In this study, first, we will verify the results using the “Zipper merging” simulation model. Second, we develop a mathematical model and verify its simulations and experiments using actual automated guided vehicles. Finally, we develop a merging timing control to augment transfer flow and verify the effects using a small full fabrication simulation. We predict that this control will improve factory model throughput when used in practical applications.

Highlights

  • In semiconductor industries, wafers are processed using various pieces of equipment and transferred between equipment by automated guided vehicles (AGVs) in an automated material handling system (AMHS).[1]

  • This study considers that AGVs have a finite acceleration and deceleration and that AGVs’ positions are controlled by the AMHS controller

  • This study developed a mathematical model based on zipper merging for AGVs in an AMHS to achieve the optimal headway distance and maximum traffic flow

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Summary

Introduction

Wafers are processed using various pieces of equipment and transferred between equipment by automated guided vehicles (AGVs) in an automated material handling system (AMHS).[1]. AGVs operate along rails in the AMHS (see Figure 1), which includes numerous intersections, such as merging and diverging points. Traffic jams occur at intersections where there is a gathering of AGVs, as shown in Several methods have been proposed to analyze and/or control the entire transportation system. These methods can be categorized into three approaches, which are simulation, statistical, and optimization based.

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