Abstract
RF MEMS switch is characterized by its pull-in potential. Stiffness constant of cantilever beam plays an important role in determining its pull-in potential. Stiffness constant of the cantilever beam depends on its material properties, dimensions and geometrical shape. In this work variable width based stepped cantilever beam is proposed for reducing the pull-in potential. Mathematical (mechanical) modeling of such unconventional cantilever beam using conjugate-beam method is presented in this paper. For obtaining pull-in potential using mathematical modeling; a python script is developed whereas CoventorWare FEM tool is used for numerical simulation. It is found that pull-in potential obtained through mathematical modeling and numerical simulation are same. Moreover it is less than normal rectangular cantilever beam of the same length, width and thickness.
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