Abstract
The deposition of metal oxide films using Spray Pyrolysis Technique (SPT) is investigated through mathematical and physical modeling. A comprehensive model is developed in the processes including atomization, spray, evaporation, chemical reaction and deposition. The predicted results including particle size and film thickness are compared with the experimental data obtained in a complementary study. The predicted film thickness is in a good agreement with the measurements when the temperature is high enough for the chemical reaction to proceed. The model also adequately predicts the size distribution when the nanocrystals are well-structured at controlled temperature and concentration.
Highlights
Mixed metal oxide films are widely applied in solar cells, optoelectronics, gas sensors etc. [1] [2]
Several techniques have been used for synthesis of mixed metal oxide films such as Spray Pyrolysis Technique (SPT), Chemical Vapor Deposition (CVD), Sol-gel [3]
The objective of this study is to develop a model for systematic investigation of the processes involved in mixed metal oxide deposi
Summary
Mixed metal oxide films are widely applied in solar cells, optoelectronics, gas sensors etc. [1] [2]. Several techniques have been used for synthesis of mixed metal oxide films such as Spray Pyrolysis Technique (SPT), Chemical Vapor Deposition (CVD), Sol-gel [3]. (2015) Mathematical Modeling and Experimental Validation of Mixed Metal Oxide Thin Film Deposition by Spray Pyrolysis. SPT is a solution based method [4] utilizing thermal deposition of a metal precursor. It involves primarily five processes namely atomization, spray, evaporation, chemical reaction and film growth. Different spray methods and the deposition stages were studied by using this approach [5] and a conceptual model of the process was developed in previous study [6]
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