Abstract
This document describes the technology of manufacturing metal oxide films ZnO, SnO2, Zn2SnO4 from aqueous solutions of the corresponding salts by spray pyrolysis. The modes and conditions of deposition of metal oxide films on hot (420 °C) glass substrates are given. The electrical parameters of the films were measured by the van der Pau method and by the Hall effect, the surface resistance was in the range from 140 to 85⋅103 Ohm/. The band gap was determined by light absorption spectra and was within 3.2...3.5 eV. For all metal oxides, the n-type conductivity was determined using the thermosonde and the Hall effect.
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